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Seeing the next generation



ASML06EUV.jpg


This is not your father's lithography system. It's a cutaway diagram of ASML's EUV alpha tool, currently being installed at IMEC and Albany Nanotech. The source isn't shown -- it doesn't exist yet -- but the radiation enters at the lower left. The reticle stage is near the top center of the system, and the wafer stage is toward the bottom center. Image courtesy of ASML.


3 January 2007 10:23 AM | Comments (0) | TrackBack (0)

 


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